High-Performance Nanoplasmonic Enhanced Indium Oxide—UV Photodetectors

In this paper, high-performance UV photodetectors have been demonstrated based on indium oxide (In2O3) thin films of approximately 1.5–2 μm thick, synthesized by a simple and quick plasma sputtering deposition approach. After the deposition, thin-film surface was treated with 4–5 nm-sized platinum (Pt) nanoparticles. Then, titanium metal electrodes were deposited onto sample to form metal–semiconductor–metal (MSM) photodetector 50 mm2 in size. Raman scattering spectroscopy scanning electron microscope (SEM) used study crystal structure In2O3 film. The nanoplasmonic enhanced In2O3-based characterized various wavelengths at different radiation intensities temperatures. A high responsivity up 18 A/W obtained 300 nm wavelength when operating 180 °C. addition, fabricated prototypes show thermally stable baseline excellent repeatability wide range lights low illumination intensity such temperature.